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9780750309769

Plasma Electronics Applications in Microelectronic Device Fabrication

Plasma Electronics Applications in Microelectronic Device Fabrication

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Product details

  • ISBN-13: 9780750309769
  • ISBN: 0750309768
  • Publication Date: 2006
  • Publisher: Taylor & Francis Group

AUTHOR

Makabe, T., Petrovic, Z.

SUMMARY

The authors examine the role of plasma processing in the area of semiconductor device fabrication for microelectronics manufacturing, thin films & materials processing. They include a look at the transfer of new research developments into the industrial arena.Makabe, T. is the author of 'Plasma Electronics Applications in Microelectronic Device Fabrication', published 2006 under ISBN 9780750309769 and ISBN 0750309768.

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