1.
Plasma Electronics Applications in Microelectronic Device Fabrication
by Makabe, T., Petrovic, Z.
ISBN: 9780750309769
List Price: $167.95
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Advances in Low Temperature Rf Plasmas Basis for Process Design
by Makabe, T.
ISBN: 9780444510952
List Price: $152.00
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Plasma Electronics : Applications in Microelectronic Device Fabrication
by Makabe, T., Petrovic�, Z., ...
ISBN: 9781420012279