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5322707

9780521029971

Soft X-rays And Extreme Ultraviolet Radiation Principles And Applications

Soft X-rays And Extreme Ultraviolet Radiation Principles And Applications

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Product details

  • ISBN-13: 9780521029971
  • ISBN: 052102997X
  • Edition: 1
  • Publication Date: 2007
  • Publisher: Cambridge University Press

AUTHOR

Attwood, David

SUMMARY

This detailed, comprehensive text describes the fundamental properties of soft x-rays and extreme ultraviolet radiation and discusses their applications in a wide variety of fields, including EUV lithography and semiconductor chip manufacture.Attwood, David is the author of 'Soft X-rays And Extreme Ultraviolet Radiation Principles And Applications', published 2007 under ISBN 9780521029971 and ISBN 052102997X.

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