Shape And Functional Elements Of The Bulk Silicon Microtechnique A Manual Of Wet Etched Silicon Structures With 165 Figures and 75 Tables

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.Frühauf, Joachim is the author of 'Shape And Functional Elements Of The Bulk Silicon Microtechnique A Manual Of Wet Etched Silicon Structures With 165 Figures and 75 Tables', published 2004 under ISBN 9783540221098 and ISBN 3540221093.