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20840120

9783642060489

Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures
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Product details

  • ISBN-13: 9783642060489
  • ISBN: 364206048X
  • Edition: 1st Editio
  • Publication Date: 2010
  • Publisher: Springer

AUTHOR

Frühauf, Joachim

SUMMARY

Frühauf, Joachim is the author of 'Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures', published 2010 under ISBN 9783642060489 and ISBN 364206048X.

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