22936927
9780819447227
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Includes full-text papers from Proceedings Vols. 2639, 2879, 3223, 3511, 3874, 4174, 4557, 4601Selected SPIE Proceedings Vol. 29 : Micromachining Process and Technology, was published 2002 under ISBN 9780819447227 and ISBN 0819447226.
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