Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis

Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis shows SIMS analysts how to acquire improved data and gain a better understanding of that data. This Handbook is unique-the information is not found elsewhere in book form, and, for the most part, is not published in the literature. The purpose of the Handbook is entirely practical-it shows how and where to use SIMS, describing the procedures and revealing the fine points of the quantitative capabilities of SIMS applied to many kinds of materials. It also explains how to employ special effects. Problems often encountered in obtaining and interpreting SIMS data are discussed in detail, along with their solutions. This practical knowledge of how to employ SIMS to best advantage has been gathered over the years through the authors' direct experience in SIMS analysis. Central to the discussion is the use of SIMS in depth profiling and bulk impurity analysis (not treated are static analysis or first monolayer analysis). Ion imaging is discussed where it may be used to elucidate problems encountered in depth profiling and bulk analysis. However, the concepts treated in the Handbook are equally applicable to areas such as geology, metallurgy, and organic materials, as shown in the examples. The data included here were obtained using both magnetic sector and quadrupole instruments. The hundreds of figures and tables make this book informative and easy to use. The Handbook also includes many examples and applications, primarily from microelectronics. The appendixes contain a wealth of information-especially valuable are the relative sensitivity factor tables. Experienced SIMS analysts, and those new to the practice, will find this Handbook an indispensable companion at the workbench.Charles W. Magee is the author of 'Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis' with ISBN 9780471519454 and ISBN 0471519456.