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35136410

9789400767980

Poly-SiGe for MEMS-Above-CMOS Sensors

Poly-SiGe for MEMS-Above-CMOS Sensors
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Product details

  • ISBN-13: 9789400767980
  • ISBN: 9400767986
  • Publication Date: 2013
  • Publisher: Springer

AUTHOR

Gonz�lez Ruiz, Pilar, De Meyer, Kristin, Witvrouw, Ann

SUMMARY

Gonz�lez Ruiz, Pilar is the author of 'Poly-SiGe for MEMS-Above-CMOS Sensors', published 2013 under ISBN 9789400767980 and ISBN 9400767986.

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