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9780788115394

Optical Characterization in Microelectronics Manufacturing

Optical Characterization in Microelectronics Manufacturing

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Product details

  • ISBN-13: 9780788115394
  • ISBN: 0788115391
  • Publisher: DIANE Publishing Company

AUTHOR

Perkowitz, S., Duncan, W. M., Seiler, D. G.

SUMMARY

Covers ellipsometry, infrared spectroscopy, optical microscopy, modulation spectroscopy, photoluminescence and raman scattering. Bibliography.Perkowitz, S. is the author of 'Optical Characterization in Microelectronics Manufacturing' with ISBN 9780788115394 and ISBN 0788115391.

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