Nanolithography And Patterning Techniques in Microelectronics

Nanolithography and Patterning Techniques in Microelectronics examines the new range of techniques that have made it possible to develop complex patterns at the nanoscale and explores their industrial applications. This book considers ways of forming and modifying surfaces for patterning and provides information on specific patterning techniques such as soft lithography, ion beam patterning, photolithography, inkjet printing, and the use of nanostencils. It also discusses prototyping and the manufacture of particular devices. With a distinguished team of contributors, this is an ideal reference for researchers and professionals using advanced polymers in such areas as microelectronics and biomedical devices.Bucknall, David G. is the author of 'Nanolithography And Patterning Techniques in Microelectronics ', published 2005 under ISBN 9780849334474 and ISBN 0849334470.