1223090
9781558992924
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A diverse set of materials science communities come together in this volume to review the extraordinary progress made in the development of computer simulation and modeling techniques for the prediction of film morphology, microstructure, composition, profile and structure. These techniques are rapidly moving out of the area of academic research and into technological and production design areas of thin-film-based industries. The volume is loosely organized in ascending order of modeling-length scales -- from atomic, up to the entire deposition reactor.Volkert, Cynthia A. is the author of 'Modeling and Simulation of Thin-Film Processing Symposium Held April 17-20, 1995, San Francisco, California, USA' with ISBN 9781558992924 and ISBN 1558992928.
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