1082901

9780122334306

Laser Microfabrication Thin Film Processes and Lithography

Laser Microfabrication Thin Film Processes and Lithography
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  • ISBN-13: 9780122334306
  • ISBN: 0122334302
  • Publisher: Elsevier Science & Technology Books

AUTHOR

Ehrlich, Daniel J., Tsao, Jeffrey Y.

SUMMARY

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.Ehrlich, Daniel J. is the author of 'Laser Microfabrication Thin Film Processes and Lithography' with ISBN 9780122334306 and ISBN 0122334302.

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