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1082758

9780931837692

Laser and Particle-Beam Chemical Processing for Microelectronics

Laser and Particle-Beam Chemical Processing for Microelectronics
$61.55
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Product details

  • ISBN-13: 9780931837692
  • ISBN: 0931837693
  • Publisher: Materials Research Society

AUTHOR

Ehrlich, D. J., Higashi, G. S., Oprysko, M. M.

SUMMARY

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.Ehrlich, D. J. is the author of 'Laser and Particle-Beam Chemical Processing for Microelectronics' with ISBN 9780931837692 and ISBN 0931837693.

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