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9781461347415

Fundamental Electron Interactions with Plasma Processing Gases

Fundamental Electron Interactions with Plasma Processing Gases
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Product details

  • ISBN-13: 9781461347415
  • ISBN: 1461347416
  • Publication Date: 2012
  • Publisher: Springer

AUTHOR

Christophorou, Loucas G., Olthoff, James K.

SUMMARY

Christophorou, Loucas G. is the author of 'Fundamental Electron Interactions with Plasma Processing Gases', published 2012 under ISBN 9781461347415 and ISBN 1461347416.

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