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9780819458452

EUV Sources for Lithography

EUV Sources for Lithography

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Product details

  • ISBN-13: 9780819458452
  • ISBN: 0819458457
  • Publication Date: 2006
  • Publisher: SPIE

AUTHOR

Bakshi, Vivek

SUMMARY

An authoritative reference book on EUV source technology, this volume has 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state of the art overview and in-depth explanation of EUV source requirements, to fundamental atomic data.Bakshi, Vivek is the author of 'EUV Sources for Lithography ', published 2006 under ISBN 9780819458452 and ISBN 0819458457.

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