Electroceramic-Based MEMS Fabrication-Technology And Applications

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.Setter, Nava is the author of 'Electroceramic-Based MEMS Fabrication-Technology And Applications', published 2004 under ISBN 9780387233109 and ISBN 0387233105.