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9780890067079

Computational Modeling in Semiconductor Processing

Computational Modeling in Semiconductor Processing

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Product details

  • ISBN-13: 9780890067079
  • ISBN: 0890067074
  • Publisher: Artech House, Incorporated

AUTHOR

Meyyappan, M.

SUMMARY

This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation -- so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.Meyyappan, M. is the author of 'Computational Modeling in Semiconductor Processing' with ISBN 9780890067079 and ISBN 0890067074.

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