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9780123496706

Chemical Vapor Deposition Principles and Applications

Chemical Vapor Deposition Principles and Applications

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Product details

  • ISBN-13: 9780123496706
  • ISBN: 0123496705
  • Publisher: Elsevier Science & Technology Books

AUTHOR

Hitchman, M. L., Jensen, K. F.

SUMMARY

This wide-ranging volume covers recent developments in the theoretical understanding of the chemistry and physics of chemical vapour deposition (CVD). Contributors are drawn from both academia and industry to achieve a balaced coverage of the subject. The volume emphasizes principles and understanding rather than details of specific materials or processes. Specific examples are given to illustrate the principles.Hitchman, M. L. is the author of 'Chemical Vapor Deposition Principles and Applications' with ISBN 9780123496706 and ISBN 0123496705.

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