Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies

Name: Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies
Author: Pauleau, Yves
ISBN: 9781402005244

by Pauleau, Yves

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ISBN-13: 9781402005244
ISBN: 1402005245
Publisher: Springer

AUTHOR

Pauleau, Yves

SUMMARY

This is an up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies.Pauleau, Yves is the author of 'Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies' with ISBN 9781402005244 and ISBN 1402005245.

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