1996 IEEE International Conference on Microelectronic Test Structures

The papers included in this leading international conference examine test structures for microelectronic devices, their recent progress and future directions. Included is a detailed treatment of current developments in silicon and gallium arsenide microelectronic test structure research, implementation, and applications. Also addressed are advances in device characterization, such as increased miniaturization, reduced operating voltages and reduced power requirements through improved measurement and test techniques. Topics highlighted include: Process Characterization, Dimensional Measurements, Interconnection, SOI & Material Characterization, Reliability, Device Characterization, Capacitance Measurements, Statistics.IEEE, Electron Devices Society Staff is the author of '1996 IEEE International Conference on Microelectronic Test Structures', published 1996 under ISBN 9780780327856 and ISBN 0780327853.